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Sentence
Span Details
この
this; last (couple of years, etc.); these; past; you (as in "you liar")-> 此のpre-noun adjective
マイクロアクチュエーター
microactuatornoun
は、
topic markergrammar
MEMS
-noun
デバイス
devicenoun
に
direction, time, indirect object, or target markergrammar
組み込ま
incorporate; embed; build in-> 組み込むgodan verb
れ
passive, potential, or respect auxiliary-> れる/られるgrammar
ている。
ongoing or resultant stategrammar