Analyzer
Sentence analysis
8Spans
Sentence
Span Details
この
this; last (couple of years, etc.); these; past; you (as in "you liar")-> 此のpre-noun adjective
膜
membrane; film; thin layernoun
は
topic markergrammar
ALD
atomic layer deposition; ALD-> ＡＬＤnoun
で
location, means, or scope markergrammar
成膜
-noun
され
passive, potential, or respect auxiliary-> されるgrammar
ました。
polite pastgrammar