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Sentence
Span Details
スパッタリング
spattering; splatteringnoun
スパッタリングすぱったりんぐsputtering
に
direction, time, indirect object, or target markergrammar
よって
therefore; consequently; accordingly-> 因ってconjunction
薄膜
thin film; thin membranenoun, no-adjective
を
object markergrammar
形成
formation; shaping; creation; repair (plastic surgery); replacement; -plastynoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar