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Sentence analysis
9Spans
Sentence
Span Details
スパッタ法
sputtering method; sputtering (semiconductor manufacturing)noun
は
topic markergrammar
薄膜
thin film; thin membranenoun, no-adjective
形成
formation; shaping; creation; repair (plastic surgery); replacement; -plastynoun, suru verb
に
direction, time, indirect object, or target markergrammar
広く
widely; extensively; broadlyadverb
用い
use; make use of; utilize-> 用いるichidan verb
られ
passive, potential, or respect auxiliary-> れる/られるgrammar
ている。
ongoing or resultant stategrammar