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Sentence analysis
9Spans
Sentence
Span Details
フォトレジスト
photoresistnoun
を
object markergrammar
塗布
application; applying; coating; spreadingnoun, suru verb
した
light/support verb with a noun or noun-like phrase-> するgrammar
後、
behind; the rear; the back; after; later; afterward; the rest; the remainder; what remains; more; left; remaining; also; in addition; another thing; successor; heir; descendant; after one's death; after one is gone; past; previousnoun, no-adjective, adverb
紫外線
ultraviolet rays; UV radiationnoun
で
location, means, or scope markergrammar
露光
exposurenoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar