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Sentence
Span Details
ホスフィン
phosphinenoun
は
topic markergrammar
半導体
semiconductornoun
製造
manufacture; productionnoun, suru verb
に
direction, time, indirect object, or target markergrammar
使わ
use; make use of; employ; handle; spend; consume; speak-> 使うgodan verb
れる
passive voice; suffering passive; potential form; spontaneous occurrence; honorific (sonkeigo)auxiliary verb, auxiliary
有毒ガス
toxic gas; poisonous gas; noxious fumesnoun
です。
be; is; arecopula, auxiliary
出洲ですspit of land; sandspit