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Sentence
Span Details
半導体素子
semiconductor device; semiconductor elementnoun
の
possession, attribution, nominalizer, or nominal linkergrammar
微細
minute; fine; very small; detailed; subtle; fine-grainedna-adjective, noun
化
-ization; -ification; change intosuffix
が
subject markergrammar
進ん
advance; go forward; move ahead; precede; go ahead; lead; make progress; improve; deepen; heighten; intensify; be fast (clock); be ahead; gain time; do willingly; do of one's own accord-> 進むgodan verb
でいる。
ongoing or resultant state-> ているgrammar