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Sentence analysis
8Spans
Sentence
Span Details
基板
circuit board; substratenoun
に
direction, time, indirect object, or target markergrammar
は
topic markergrammar
レジスト
resistance; opposition; obstruction; insulating coating; insulating varnishnoun, suru verb
が
subject markergrammar
塗布
application; applying; coating; spreadingnoun, suru verb
され
passive, potential, or respect auxiliary-> されるgrammar
ている。
ongoing or resultant stategrammar