noun
silica glass
Technical term for glass made primarily of silicon dioxide (SiO₂), also known as fused quartz or fused silica.
シリカガラスは耐熱性が高いため、半導体製造装置に使われる。
Silica glass is used in semiconductor manufacturing equipment because of its high heat resistance.
Variant with a middle dot, sometimes used for clarity.
Loanword from English 'silica glass'.