Analyzer
Sentence analysis
10Spans
Sentence
Span Details
この
this; last (couple of years, etc.); these; past; you (as in "you liar")-> 此のpre-noun adjective
装置
device; equipment; apparatus; installation; stage setting; stage setnoun, suru verb
は
topic markergrammar
気相エピタキシー
vapor phase epitaxy; VPEnoun
に
direction, time, indirect object, or target markergrammar
よって
therefore; consequently; accordingly-> 因ってconjunction
薄膜
thin film; thin membranenoun, no-adjective
を
object markergrammar
形成
formation; shaping; creation; repair (plastic surgery); replacement; -plastynoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar