Analyzer
Sentence analysis
12Spans
Sentence
Span Details
この
this; last (couple of years, etc.); these; past; you (as in "you liar")-> 此のpre-noun adjective
装置
device; equipment; apparatus; installation; stage setting; stage setnoun, suru verb
は
topic markergrammar
電子ビーム
electron beamnoun
を
object markergrammar
使っ
use; make use of; employ; handle; spend; consume; speak-> 使うgodan verb
て
connective te-formgrammar
微細
minute; fine; very small; detailed; subtle; fine-grainedna-adjective, noun
加工
processing; manufacturing; treatment; machiningnoun, suru verb
を
object markergrammar
行い
perform; carry out; conduct; do-> 行うgodan verb
ます。
polite non-pastgrammar