Analyzer
Sentence analysis
10Spans
Sentence
Span Details
イオンビーム
ion beamnoun
を
object markergrammar
使っ
use; make use of; employ; handle; spend; consume; speak-> 使うgodan verb
て
connective te-formgrammar
試料
sample; specimen; test piecenoun
の
possession, attribution, nominalizer, or nominal linkergrammar
表面
surface; face; outside; exterior; appearances; superficialitynoun, no-adjective
を
object markergrammar
分析
analysisnoun, suru verb
した。
light/support verb with a noun or noun-like phrase-> するgrammar