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Sentence analysis

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Sentence

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Sentence

シリコン基き板ばん上うえにエピタキシャル成せい長ちょうで薄はく膜まくを形けい成せいする。

Span Details

基き板ばん

circuit board; substrate

上うえ

surface; on top of

noun, no-adjective, suffix

direction, time, indirect object, or target marker

エピタキシャル成せい長ちょう

epitaxial growth; epitaxy

location, means, cause, or scope marker

薄はく膜まく

thin film; thin membrane

noun, no-adjective

形けい成せい

formation; shaping; creation

noun, suru verb

light/support verb with a noun or noun-like phrase