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Sentence analysis
6Spans
Sentence
Span Details
スパッタ
-noun
蒸着
vacuum deposition; vapor depositionnoun, suru verb
装置
device; equipment; apparatus; installation; stage setting; stage setnoun, suru verb
を
object markergrammar
導入
introduction; bringing in; installation; importation; introduction (of a story, lecture, etc.); introductory partnoun, suru verb
した。
light/support verb with a noun or noun-like phrase-> するgrammar