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Sentence

半はん導どう体たいの製せい造ぞうにはリソグラフィー技ぎ術じゅつが不ふ可か欠けつだ。

Span Details

半はん導どう体たい

possession, attribution, nominalizer, or nominal linker

製せい造ぞう

manufacture; production

noun, suru verb

direction, time, indirect object, or target marker

リソグラフィー

技ぎ術じゅつ

technology; engineering

不ふ可か欠けつ

indispensable; essential; vital

na-adjective, noun