AnalyzerSentence analysis4SpansSentence原子層堆積法1000 character limitAnalyzeSentence原げん子し層そう堆たい積せき法ほうSpan Details原げん子しatomnoun層そうlayer; stratum; seam; bed; class; bracket; group; sheaf; counter for stories (of a building)noun, noun suffix, counter堆たい積せきaccumulation; pile; heap; sedimentationnoun, suru verb法ほうlaw; act; principle; method; way; mood (grammar); dharma; law (Buddhism)noun, noun suffix
