Analyzer
Sentence analysis
8Spans
Sentence
Span Details
基体
base; substrate; substratumnoun
の
possession, attribution, nominalizer, or nominal linkergrammar
上
above; over; up; top; summit; upper part; surface; on top of; the above; earlier part (in a text); superior; better; higher (rank); elder; older; senior; in terms of; as far as ... is concerned; when it comes to; besides; in addition to; after; upon; as a result of; since; now that; because; honorable; venerable; dear (suffix); emperor; sovereign; shogun; daimyo (archaic)noun, no-adjective, suffix
に
direction, time, indirect object, or target markergrammar
薄膜
thin film; thin membranenoun, no-adjective
を
object markergrammar
形成
formation; shaping; creation; repair (plastic surgery); replacement; -plastynoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar