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Sentence
Span Details
液相成長
liquid phase deposition; liquid phase epitaxynoun
法
law; act; principle; method; way; mood (grammar); dharma; law (Buddhism)noun, noun suffix
は、
topic markergrammar
半導体
semiconductornoun
デバイス
devicenoun
の
possession, attribution, nominalizer, or nominal linkergrammar
製造
manufacture; productionnoun, suru verb
に
direction, time, indirect object, or target markergrammar
用い
use; make use of; utilize-> 用いるichidan verb
られる。
passive, potential, or respect auxiliary-> れる/られるgrammar