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遅れ
be late; be delayed; fall behind schedule; fall behind; lag behind; be behind the times; be preceded in death; be bereaved of; be slow (clock or watch)-> 遅れるichidan verb
ず
without doing; not doinggrammar
に
direction, time, indirect object, or target markergrammar
来た。
next; forthcoming; coming; to come; to arrive; to be due to-> 来るpre-noun adjective, verb