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Sentence
Span Details
露光装置
lithography equipment; exposure systemnoun
の
possession, attribution, nominalizer, or nominal linkergrammar
精度
precision; accuracynoun
が
subject markergrammar
チップ
tip; gratuity; foul tip; tip (of a ballpoint pen)noun
チップちっぷchip; microchip; casino token; chip shot; wood chip; potato chip; crisp
の
possession, attribution, nominalizer, or nominal linkergrammar
性能
performance; capability; efficiencynoun
を
object markergrammar
左右
left and right; both sides; influence; control; determine; attendants; people at one's side; serving at someone's side; equivocation; evasive speechnoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar