Analyzer
Sentence analysis
11Spans
Sentence
Span Details
MBE
molecular beam epitaxy; MBE-> ＭＢＥnoun
は
topic markergrammar
高品質
high qualitynoun, na-adjective
な
adnominal form of the copula after a na-adjectivegrammar
半導体
semiconductornoun
薄膜
thin film; thin membranenoun, no-adjective
の
possession, attribution, nominalizer, or nominal linkergrammar
作製
manufacture; productionnoun, suru verb
に
direction, time, indirect object, or target markergrammar
使わ
use; make use of; employ; handle; spend; consume; speak-> 使うgodan verb
れる。
passive voice; suffering passive; potential form; spontaneous occurrence; honorific (sonkeigo)auxiliary verb, auxiliary