液えき浸しん

noun

immersion; dipping

Technical term used in microscopy and photolithography. In microscopy, it refers to immersing both the objective lens and the specimen in a liquid to increase the numerical aperture. In photolithography, it refers to filling the air gap between the final lens and the wafer surface with a liquid to increase resolution.

• 液えき浸しん対たい物ぶつレンズは高こう解かい像ぞう度どの顕けん微び鏡きょう観かん察さつに用もちいられる。

  Immersion objective lenses are used for high-resolution microscopy.

• 液えき浸しんリソグラフィは半はん導どう体たい製せい造ぞうで重じゅう要ような技ぎ術じゅつである。

  Immersion lithography is an important technique in semiconductor manufacturing.