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Sentence analysis
10Spans
Sentence
Span Details
シリコンウェハー
silicon wafer-> シリコンウエハーnoun
の
possession, attribution, nominalizer, or nominal linkergrammar
熱酸化
thermal oxidationnoun
に
direction, time, indirect object, or target markergrammar
よって
therefore; consequently; accordingly-> 因ってconjunction
二酸化ケイ素
silicon dioxide; silicanoun
膜
membrane; film; thin layernoun
を
object markergrammar
形成
formation; shaping; creation; repair (plastic surgery); replacement; -plastynoun, suru verb
する。
light/support verb with a noun or noun-like phrasegrammar