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11Spans
Sentence
Span Details
気相エピタキシャル成長
vapor-phase epitaxial growth; vapor-phase epitaxy; VPEnoun
は、
topic markergrammar
高品質
high qualitynoun, na-adjective
な
adnominal form of the copula after a na-adjectivegrammar
半導体
semiconductornoun
薄膜
thin film; thin membranenoun, no-adjective
の
possession, attribution, nominalizer, or nominal linkergrammar
作製
manufacture; productionnoun, suru verb
に
direction, time, indirect object, or target markergrammar
用い
use; make use of; utilize-> 用いるichidan verb
られる。
passive, potential, or respect auxiliary-> れる/られるgrammar