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Sentence
Span Details
気相エピタキシー
vapor phase epitaxy; VPEnoun
は
topic markergrammar
化合物半導体
compound semiconductornoun
の
possession, attribution, nominalizer, or nominal linkergrammar
製造
manufacture; productionnoun, suru verb
に
direction, time, indirect object, or target markergrammar
広く
widely; extensively; broadlyadverb
使わ
use; make use of; employ; handle; spend; consume; speak-> 使うgodan verb
れ
passive, potential, or respect auxiliary-> れる/られるgrammar
ている。
ongoing or resultant stategrammar