熱ねつ酸さん化か

noun

thermal oxidation

Technical term in chemistry and materials science for oxidation induced by heat, e.g., in semiconductor processing.

• シリコンウェハーの熱ねつ酸さん化かによって二に酸さん化かケイ素そ膜まくを形けい成せいする。

  A silicon dioxide film is formed by thermal oxidation of the silicon wafer.